SL-90-05-3 — HVAC Systems for Semiconductor Clean rooms—Part 1: System Components
- Comments Off on SL-90-05-3 — HVAC Systems for Semiconductor Clean rooms—Part 1: System Components
- ASHRAE
Examines the major energy-using components involved in a class 10 clean room design. Includes suggestions for lower operating costs with proper selection of HVAC components.
KEYWORDS: Clean rooms, heating, selecting, ventilation, air conditioning, designing, energy conservation.
Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990
Product Details
- Published:
- 1990
- Number of Pages:
- 6
- File Size:
- 1 file , 1000 KB
- Product Code(s):
- D-18701
